High temperature Al₂O₃ diffusion barriers by reactive D.C. magnetron sputtering

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Cai, Zhiwei

Date: 1992

Subjects: Diffusion coatings
Aluminum oxide
Sputtering (Physics)

Program of Study: Materials Science and Mechanics

Degree Level: Masters

Language: English

Pages: vi, 56 pages

Permalink: https://doi.org/doi:10.25335/M52F7JX0J