Polycrystalline diamond RF MEMS resonator technology and characterization

In Collections: Electronic Theses & Dissertations

Copyright Status: In Copyright

Material Type: Theses

Authors: Sepúlveda-Alancastro, Nelson

Date: 2005

Subjects: Building materials
Diamond crystals
Microelectromechanical systems
Polycrystals
Resonators

Degree Level: Doctoral

Language: English

Pages: xii, 127 pages

Permalink: https://doi.org/doi:10.25335/M5HX1613S